Publikationen

I. Lampouras, M. Holz, S. Strehle, J. Körner (2024): Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride,  Journal of Micromechanics and Microengineering 34:015005

I. Lampouras, J. Körner (2023): Herstellung ko-resonant gekoppelter Cantilever-Sensoren mit geometrischer Frequenzanpassung,  MST Kongress, Dresden (Germany), 23rd-25th October 2023

I. Lampouras, J. Körner (2022): Development of a batch-fabrication process for highly sensitive co-resonant cantilever sensors,  MNE / Eurosensors 2022, Leuven (Belgium), 19th – 23rd September 2022