Publications
Journals
-
(2024): Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride, Journal of Micromechanics and Microengineering 34:015005
Conferences
-
(2023): Herstellung ko-resonant gekoppelter Cantilever-Sensoren mit geometrischer Frequenzanpassung, MST Kongress, Dresden (Germany), 23rd-25th October 2023
-
(2022): Development of a batch-fabrication process for highly sensitive co-resonant cantilever sensors, MNE / Eurosensors 2022, Leuven (Belgium), 19th – 23rd September 2022